Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6351367 | Electrostatic holding apparatus having insulating layer with enables easy attachment and detachment of semiconductor object | Yoshikazu Ohtani, Kenichi Arai, Shinji Kojima, Toshimi Kobayashi | 2002-02-26 |