Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420729 | Process to produce ultrathin crystalline silicon nitride on Si (111) for advanced gate dielectrics | Robert M. Wallace, Glen Wilk, Sunil Hattangady | 2002-07-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420729 | Process to produce ultrathin crystalline silicon nitride on Si (111) for advanced gate dielectrics | Robert M. Wallace, Glen Wilk, Sunil Hattangady | 2002-07-16 |