Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498502 | Apparatus and method for evaluating semiconductor structures and devices | Henry Litzmann Edwards, Theodore S. Moise | 2002-12-24 |
| 6495474 | Method of fabricating a dielectric layer | Conor S. Rafferty | 2002-12-17 |
| 6479404 | Process for fabricating a semiconductor device having a metal oxide or a metal silicate gate dielectric layer | Michael L. Steigerwald | 2002-11-12 |
| 6468856 | High charge storage density integrated circuit capacitor | Robert M. Wallace, Mark Anthony, Dim-Lee Kwong | 2002-10-22 |
| 6436801 | Hafnium nitride gate dielectric | Robert M. Wallace | 2002-08-20 |
| 6420729 | Process to produce ultrathin crystalline silicon nitride on Si (111) for advanced gate dielectrics | Robert M. Wallace, Yi Wei, Sunil Hattangady | 2002-07-16 |