Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488822 | Segmented-target ionized physical-vapor deposition apparatus and method of operation | — | 2002-12-03 |
| 6475359 | Thin-film processing electromagnet with modified core for producing low-skew magnetic orientation | Shiyuan Cheng, Xiangqun Chen, Cecil J. Davis | 2002-11-05 |
| 6471830 | Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system | Ajit Paranjpe | 2002-10-29 |
| 6461675 | Method for forming a copper film on a substrate | Ajit Paranjpe, Lino Velo, Thomas R. Omstead, David Campbell, Zeming Liu +1 more | 2002-10-08 |
| 6444263 | Method of chemical-vapor deposition of a material | Ajit Paranjpe, Randhir Bubber, Sanjay Gopinath, Thomas R. Omstead | 2002-09-03 |
| 6444103 | Method and apparatus for thin film deposition using an active shutter | Yong Jin Lee, Cecil J. Davis, Ajit Paranjpe | 2002-09-03 |
| 6378600 | Thermally conductive chuck with thermally separated sealing structures | — | 2002-04-30 |
| 6376372 | Approaches for mitigating the narrow poly-line effect in silicide formation | Ajit Paranjpe, Pushkar Apte | 2002-04-23 |
| 6365502 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Ajit Paranjpe, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2002-04-02 |