Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471830 | Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system | Mehrdad M. Moslehi | 2002-10-29 |
| 6461675 | Method for forming a copper film on a substrate | Mehrdad M. Moslehi, Lino Velo, Thomas R. Omstead, David Campbell, Zeming Liu +1 more | 2002-10-08 |
| 6444103 | Method and apparatus for thin film deposition using an active shutter | Mehrdad M. Moslehi, Yong Jin Lee, Cecil J. Davis | 2002-09-03 |
| 6444263 | Method of chemical-vapor deposition of a material | Randhir Bubber, Sanjay Gopinath, Thomas R. Omstead, Mehrdad M. Moslehi | 2002-09-03 |
| 6391754 | Method of making an integrated circuit interconnect | — | 2002-05-21 |
| 6376372 | Approaches for mitigating the narrow poly-line effect in silicide formation | Pushkar Apte, Mehrdad M. Moslehi | 2002-04-23 |
| 6365502 | Microelectronic interconnect material with adhesion promotion layer and fabrication method | Mehrdad M. Moslehi, Boris Relja, Randhir Bubber, Lino Velo, Thomas R. Omstead +3 more | 2002-04-02 |
| 6339369 | Retrofittable vehicle collision warning apparatus | — | 2002-01-15 |