Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451646 | High-k dielectric materials and processes for manufacturing them | Ming-Jang Hwang | 2002-09-17 |
| 6451677 | Plasma-enhanced chemical vapor deposition of a nucleation layer in a tungsten metallization process | Boyang Lin, Wei-Yung Hsu | 2002-09-17 |
| 6365517 | Process for depositing thin films containing titanium and nitrogen | Ming-Jang Hwang | 2002-04-02 |