Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451677 | Plasma-enhanced chemical vapor deposition of a nucleation layer in a tungsten metallization process | Jiong-Ping Lu, Wei-Yung Hsu | 2002-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451677 | Plasma-enhanced chemical vapor deposition of a nucleation layer in a tungsten metallization process | Jiong-Ping Lu, Wei-Yung Hsu | 2002-09-17 |