Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426117 | Method for forming a three-component nitride film containing metal and silicon | Won-Yong Koh, Sang Won Kang | 2002-07-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426117 | Method for forming a three-component nitride film containing metal and silicon | Won-Yong Koh, Sang Won Kang | 2002-07-30 |