Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432205 | Gas feeding system for chemical vapor deposition reactor and method of controlling the same | Kyu-Hong Lee, Won Gu Kang | 2002-08-13 |
| 6426117 | Method for forming a three-component nitride film containing metal and silicon | Kyoung Soo YI, Won-Yong Koh | 2002-07-30 |