Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426117 | Method for forming a three-component nitride film containing metal and silicon | Kyoung Soo YI, Sang Won Kang | 2002-07-30 |
| 6409830 | Process for preparing a limo2 type heterometallic oxide film | Yun Soo Kim, Su-Jin Ku | 2002-06-25 |