Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432325 | Electrode | Munemitsu Hamada, Makoto Takahashi, Dai Matsuoka, Masatada Yodogawa, Hiraku Harada | 2002-08-13 |
| 6425801 | Polishing process monitoring method and apparatus, its endpoint detection method, and polishing machine using same | Hideo Mitsuhashi, Katsuhisa Ohkawa, Yoshihiro Hayashi, Takahiro Onodera | 2002-07-30 |
| 6383416 | Electron-emitting material and preparing process | Munemitsu Hamada, Makoto Takahashi, Dai Matsuoka, Masatada Yodogawa, Hiraku Harada | 2002-05-07 |