Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490497 | Working process end point real time determination method | Katsuhisa Okawa, Hiroshi Naka | 2002-12-03 |
| 6428202 | Method for inspecting connection state of electronic part and a substrate, and apparatus for the same | Katsuhisa Ookawa | 2002-08-06 |
| 6425801 | Polishing process monitoring method and apparatus, its endpoint detection method, and polishing machine using same | Akira Takeishi, Katsuhisa Ohkawa, Yoshihiro Hayashi, Takahiro Onodera | 2002-07-30 |