Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6425801 | Polishing process monitoring method and apparatus, its endpoint detection method, and polishing machine using same | Akira Takeishi, Hideo Mitsuhashi, Katsuhisa Ohkawa, Yoshihiro Hayashi | 2002-07-30 |