Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498106 | Prevention of defects formed in photoresist during wet etching | Pin-Yi Hsin, Jyh-Shiou Hsu | 2002-12-24 |
| 6475917 | Method to reduce the metal TiN ARC damage in etching back process | Yun-Hung Shen | 2002-11-05 |