Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498106 | Prevention of defects formed in photoresist during wet etching | Yu-Lun Lin, Jyh-Shiou Hsu | 2002-12-24 |
| 6444587 | Plasma etch method incorporating inert gas purge | Mu-Tsang Lin | 2002-09-03 |