Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486067 | Method for improving the electrical isolation between the contact and gate in a self-aligned contact MOSFET device structure | Hsueh-Heng Liu | 2002-11-26 |
| 6475917 | Method to reduce the metal TiN ARC damage in etching back process | Yu-Lun Lin | 2002-11-05 |