Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6409587 | Dual-hardness polishing pad for linear polisher and method for fabrication | Tsu Shih, Syun-Ming Jang, Ying-Ho Chen | 2002-06-25 |
| 6398627 | Slurry dispenser having multiple adjustable nozzles | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang | 2002-06-04 |
| 6383930 | Method to eliminate copper CMP residue of an alignment mark for damascene processes | Ying-Ho Chen, Tsu Shih, Syun-Ming Jang | 2002-05-07 |