Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492073 | Removal of line end shortening in microlithography and mask set for removal | Burn Jeng Lin, Ru-Gun Liu, Shih-Ying Chen, Hua-Tai Lin, Anthony Yen +1 more | 2002-12-10 |
| 6348288 | Resolution enhancement method for deep quarter micron technology | Hong-Chang Hsieh | 2002-02-19 |