Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492073 | Removal of line end shortening in microlithography and mask set for removal | Ru-Gun Liu, Shih-Ying Chen, Shinn-Sheng Yu, Hua-Tai Lin, Anthony Yen +1 more | 2002-12-10 |
| 6492077 | Multiple-reticle mask holder and aligner | — | 2002-12-10 |