Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455330 | Methods to create high-k dielectric gate electrodes with backside cleaning | Ming-Fang Wang, Shih-Chang Chen, Mong-Song Liang | 2002-09-24 |
| 6413885 | Method for patterning semiconductor devices on a silicon substrate using oxynitride film | Pin-Ting Wang | 2002-07-02 |
| 6372642 | Method for patterning semiconductor devices with a resolution down to 0.12 &mgr;m on a silicon substrate using oxynitride film and deep UV lithography | Pin-Ting Wang | 2002-04-16 |