Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413885 | Method for patterning semiconductor devices on a silicon substrate using oxynitride film | Liang-Gi Yao | 2002-07-02 |
| 6372642 | Method for patterning semiconductor devices with a resolution down to 0.12 &mgr;m on a silicon substrate using oxynitride film and deep UV lithography | Liang-Gi Yao | 2002-04-16 |