Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444541 | Method for forming lining oxide in shallow trench isolation incorporating pre-annealing step | Jun-Yang Lai, Jih-Hwa Wang, Chou-Jie Tsai, Chin-Te Huang, Su-Yu Yeh +2 more | 2002-09-03 |
| 6444544 | Method of forming an aluminum protection guard structure for a copper metal structure | Chu-Wei Hu, Kuo-Hua Pan, Hsien-Chin Lin | 2002-09-03 |