Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440863 | Plasma etch method for forming patterned oxygen containing plasma etchable layer | Chao-Cheng Chen, Hun-Jan Tao | 2002-08-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440863 | Plasma etch method for forming patterned oxygen containing plasma etchable layer | Chao-Cheng Chen, Hun-Jan Tao | 2002-08-27 |