Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Chih-Hao Lin, Xi-Sheng Zhuang, Song Chen | 2002-10-08 |
BC
Bu-Fang Chen
Overall (2002): #246,117 of 266,432Top 95%
1
Patents 2002