Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Bu-Fang Chen, Xi-Sheng Zhuang, Song Chen | 2002-10-08 |
CL
Chih-Hao Lin
Overall (2002): #241,585 of 266,432Top 95%
1
Patents 2002