Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461979 | LPCVD furnace uniformity improvement by temperature ramp down deposition system | Chih-Hao Lin, Bu-Fang Chen, Xi-Sheng Zhuang | 2002-10-08 |
SC
Song Chen
Overall (2002): #115,658 of 266,432Top 45%
1
Patents 2002