Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498067 | Integrated approach for controlling top dielectric loss during spacer etching | Ming-Huang Tsai, Ju-Wang Hsu, Hun-Jan Tao | 2002-12-24 |
| 6479403 | Method to pattern polysilicon gates with high-k material gate dielectric | Ming-Huan Tsei, Hun-Jan Tao | 2002-11-12 |