Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498067 | Integrated approach for controlling top dielectric loss during spacer etching | Baw-Ching Perng, Ju-Wang Hsu, Hun-Jan Tao | 2002-12-24 |
MT
Ming-Huang Tsai
Overall (2002): #150,164 of 266,432Top 60%
1
Patents 2002