Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468351 | Vacuum processing apparatus with improved maintainability | Kazuhiro Noda, Tetsuhiro Iwai | 2002-10-22 |
| 6432751 | Resin mold electric part and producing method therefor | — | 2002-08-13 |
| 6350664 | Semiconductor device and method of manufacturing the same | Shoji Sakemi | 2002-02-26 |
| 6340639 | Plasma process apparatus and plasma process method for substrate | Kiyoshi Arita, Tetsuhiro Iwai | 2002-01-22 |