Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6418941 | Method of and apparatus for plasma cleaning of chip-mounted board | Tanemasa Asano | 2002-07-16 |
| 6340639 | Plasma process apparatus and plasma process method for substrate | Tetsuhiro Iwai, Hiroshi Haji | 2002-01-22 |