Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468351 | Vacuum processing apparatus with improved maintainability | Kazuhiro Noda, Hiroshi Haji | 2002-10-22 |
| 6340639 | Plasma process apparatus and plasma process method for substrate | Kiyoshi Arita, Hiroshi Haji | 2002-01-22 |