Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500052 | Method of polishing a ceramic substrate | Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhisa Yushio | 2002-12-31 |
| 6460482 | Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Akira Kuibira | 2002-10-08 |
| 6458444 | Ceramic substrate and polishing method thereof | Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhisa Yushio | 2002-10-01 |
| 6428741 | Aluminum nitride sintered body and method of preparing the same | Yasuhisa Yushio, Kazutaka Sasaki, Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhiro Murase | 2002-08-06 |
| 6423400 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Masuhiro Natsuhara | 2002-07-23 |
| 6403510 | Aluminum nitride sintered body and manufacturing method thereof | Akira Kuibira, Kenjiro Higaki, Kazutaka Sasaki, Takashi Ishii | 2002-06-11 |
| 6392197 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Masuhiro Natsuhara | 2002-05-21 |
| 6384378 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Masuhiro Natsuhara | 2002-05-07 |
| 6365879 | Wafer holder for semiconductor manufacturing apparatus | Akira Kuibira | 2002-04-02 |