Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500052 | Method of polishing a ceramic substrate | Masuhiro Natsuhara, Hirohiko Nakata, Motoyuki Tanaka | 2002-12-31 |
| 6458444 | Ceramic substrate and polishing method thereof | Masuhiro Natsuhara, Hirohiko Nakata, Motoyuki Tanaka | 2002-10-01 |
| 6428741 | Aluminum nitride sintered body and method of preparing the same | Hirohiko Nakata, Kazutaka Sasaki, Masuhiro Natsuhara, Motoyuki Tanaka, Yasuhiro Murase | 2002-08-06 |
| 6423400 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Hirohiko Nakata, Masuhiro Natsuhara | 2002-07-23 |