Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460482 | Gas shower unit for semiconductor manufacturing apparatus and semiconductor manufacturing apparatus | Hirohiko Nakata | 2002-10-08 |
| 6403510 | Aluminum nitride sintered body and manufacturing method thereof | Hirohiko Nakata, Kenjiro Higaki, Kazutaka Sasaki, Takashi Ishii | 2002-06-11 |
| 6365879 | Wafer holder for semiconductor manufacturing apparatus | Hirohiko Nakata | 2002-04-02 |