Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447379 | Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor | Robert D. Gromko, Stephen C. Schultz, James Lee, Junedong Lee | 2002-09-10 |
| 6390905 | Workpiece carrier with adjustable pressure zones and barriers | Nikolay Korovin, Stephen C. Schultz, James L. Farmer | 2002-05-21 |
| 6336853 | Carrier having pistons for distributing a pressing force on the back surface of a workpiece | Stephen C. Schultz, Nikolay Korovin | 2002-01-08 |