Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447379 | Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor | Stephen C. Schultz, John D. Herb, James Lee, Junedong Lee | 2002-09-10 |