Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468131 | Method to mathematically characterize a multizone carrier | — | 2002-10-22 |
| 6390905 | Workpiece carrier with adjustable pressure zones and barriers | Stephen C. Schultz, John D. Herb, James L. Farmer | 2002-05-21 |
| 6336853 | Carrier having pistons for distributing a pressing force on the back surface of a workpiece | Stephen C. Schultz, John D. Herb | 2002-01-08 |