Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383941 | Method of etching organic ARCs in patterns having variable spacings | Meihua Shen, Jeffrey D. Chinn, Dragan Podlesnik | 2002-05-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383941 | Method of etching organic ARCs in patterns having variable spacings | Meihua Shen, Jeffrey D. Chinn, Dragan Podlesnik | 2002-05-07 |