Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478834 | Slurry for chemical mechanical polishing | Yasuaki Tsuchiya, Tomoko Wake, Tetsuyuki Itakura, Shin Sakurai | 2002-11-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478834 | Slurry for chemical mechanical polishing | Yasuaki Tsuchiya, Tomoko Wake, Tetsuyuki Itakura, Shin Sakurai | 2002-11-12 |