Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355516 | Method of manufacturing a capacitor with a bi-layer Ta2O5 capacitor dielectric in a semiconductor device including performing a plasma treatment on the first Ta2O5 layer | Kyong-Min Kim, Chang Seo Park, Han-Sang Song, Ki-Seon Park, Chan Lim | 2002-03-12 |