Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486021 | Method for manufacturing a semiconductor device having incorporated therein a high K capacitor dielectric | Min Soo Kim | 2002-11-26 |
| 6465371 | Method for manufacturing zirconium oxide film for use in semiconductor device | — | 2002-10-15 |
| 6426307 | Method of manufacturing an aluminum oxide film in a semiconductor device | — | 2002-07-30 |
| 6417042 | Method of manufacturing a capacitor in a semiconductor device | Han-Sang Song, Hyung-Bok Choi | 2002-07-09 |
| 6403156 | Method of forming an A1203 film in a semiconductor device | Hyuk Kyoo Jang | 2002-06-11 |
| 6387749 | Method of manufacturing a capacitor in a semiconductor device | — | 2002-05-14 |
| 6355516 | Method of manufacturing a capacitor with a bi-layer Ta2O5 capacitor dielectric in a semiconductor device including performing a plasma treatment on the first Ta2O5 layer | You Sung Kim, Kyong-Min Kim, Chang Seo Park, Han-Sang Song, Ki-Seon Park | 2002-03-12 |
| 6344428 | Method of forming catalyst layer for fuel cell | Hyuk Chang | 2002-02-05 |