Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410381 | Method for forming capacitor of semiconductor device | Kyung Cheol Jeong, Han-Sang Song, Dong-Jun KIM | 2002-06-25 |
| 6365487 | Method of manufacturing a capacitor in a semiconductor device | Han-Sang Song, Dong-Jun KIM | 2002-04-02 |
| 6355516 | Method of manufacturing a capacitor with a bi-layer Ta2O5 capacitor dielectric in a semiconductor device including performing a plasma treatment on the first Ta2O5 layer | You Sung Kim, Chang Seo Park, Han-Sang Song, Ki-Seon Park, Chan Lim | 2002-03-12 |