Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494956 | System for processing a workpiece | Raymon F. Thompson | 2002-12-17 |
| 6446643 | Micro-environment chamber and system for rinsing and drying a semiconductor workpiece | Raymon F. Thompson | 2002-09-10 |
| 6447633 | Reactor for processing a semiconductor wafer | Steven L. Peace, Raymon F. Thompson, Brian Aegerter, Curt Dundas | 2002-09-10 |
| 6447232 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Jeffry Davis, Kert Dolechek | 2002-09-10 |
| 6423642 | Reactor for processing a semiconductor wafer | Steven L. Peace, Raymon F. Thompson, Brian Aegerter, Curt Dundas | 2002-07-23 |
| 6413436 | Selective treatment of the surface of a microelectronic workpiece | Brian Aegerter, Curt Dundas, Michael Jolley, Tom Ritzdorf, Steven L. Peace +1 more | 2002-07-02 |
| 6395101 | Single semiconductor wafer processor | Dana Scranton | 2002-05-28 |
| 6374837 | Single semiconductor wafer processor | Dana Scranton | 2002-04-23 |
| 6350319 | Micro-environment reactor for processing a workpiece | Raymon F. Thompson | 2002-02-26 |