Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454514 | Microelectronic workpiece support and apparatus using the support | — | 2002-09-24 |
| 6447232 | Semiconductor wafer processing apparatus having improved wafer input/output handling system | Kert Dolechek, Gary L. Curtis | 2002-09-10 |
| 6439824 | Automated semiconductor immersion processing system | Randy Harris, David Peterson | 2002-08-27 |