Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494956 | System for processing a workpiece | Gary L. Curtis | 2002-12-17 |
| 6446643 | Micro-environment chamber and system for rinsing and drying a semiconductor workpiece | Gary L. Curtis | 2002-09-10 |
| 6447633 | Reactor for processing a semiconductor wafer | Steven L. Peace, Gary L. Curtis, Brian Aegerter, Curt Dundas | 2002-09-10 |
| 6423642 | Reactor for processing a semiconductor wafer | Steven L. Peace, Gary L. Curtis, Brian Aegerter, Curt Dundas | 2002-07-23 |
| 6418945 | Dual cassette centrifugal processor | Clif Neil | 2002-07-16 |
| 6413436 | Selective treatment of the surface of a microelectronic workpiece | Brian Aegerter, Curt Dundas, Michael Jolley, Tom Ritzdorf, Steven L. Peace +1 more | 2002-07-02 |
| 6350319 | Micro-environment reactor for processing a workpiece | Gary L. Curtis | 2002-02-26 |
| 6334453 | Seal configuration for use with a motor drive assembly in a microelectronic workpiece processing system | Scott Bruner | 2002-01-01 |