Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479409 | Fabrication of a semiconductor device with an interlayer insulating film formed from a plasma devoid of an oxidizing agent | Yoshimi Shioya, Kouichi Ohira, Kazuo Maeda, Tomomi Suzuki, Hiroshi Ikakura +3 more | 2002-11-12 |