Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464794 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Jeong-hyuck Park, Hee-duk Kim, Jung-hun Cho, Jong-wook Choi, Sung-bum Cho +6 more | 2002-10-15 |
| 6437411 | Semiconductor device having chamfered silicide layer and method for manufacturing the same | Chang-Won Choi, Dae-Hyuk Chung, Woo-Sik Kim, Yeo-cheol Yoon, Bum Su Kim +2 more | 2002-08-20 |