Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461937 | Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, In-Seak Hwang, Dong-Ho Ahn, Moon-han Park +1 more | 2002-10-08 |