Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500726 | Shallow trench isolation type semiconductor device and method of forming the same | Keum-Joo Lee, Young Min Kwon, Chang-Lyoung Song | 2002-12-31 |
| 6461937 | Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, Young-sun Koh, Dong-Ho Ahn, Moon-han Park +1 more | 2002-10-08 |
| 6369008 | Cleaning solutions for removing contaminants from the surfaces of semiconductor substrates and cleaning methods using the same | Heon-jae Ha, Dae-Hyuk Chung, Yong-Sun Ko | 2002-04-09 |