Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482715 | Method of forming shallow trench isolation layer in semiconductor device | Tai-Su Park, Ho-Kyu Kang, Dong-Ho Ahn | 2002-11-19 |
| 6465866 | Trench isolation regions having trench liners with recessed ends | Tai-Su Park, Kyung Won Park, Han-Sin Lee | 2002-10-15 |
| 6461937 | Methods of forming trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, Keum-Joo Lee, In-Seak Hwang, Young-sun Koh, Dong-Ho Ahn +1 more | 2002-10-08 |